Open AccessRecent Advance in Preparation and Ultra-precision Machining of New Generation Semiconductor Material of β-Ga2O3 Single Crystals
Publication year - 2021
Publication title -
journal of mechanical engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.342
H-Index - 50
ISSN - 0577-6686
DOI - 10.3901/jme.2021.09.213
Subject(s) - machining , materials science , semiconductor , semiconductor materials , semiconductor industry , optoelectronics , engineering physics , nanotechnology , metallurgy , manufacturing engineering , engineering
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