
Design and Experimental Investigation of a New Monolithic Micro-chuck
Author(s) -
Wei Li
Publication year - 2014
Publication title -
jixie gongcheng xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.342
H-Index - 50
ISSN - 0577-6686
DOI - 10.3901/jme.2014.01.193
Subject(s) - materials science , engineering