Open AccessA Review of Silicon Micromachined Resonant Pressure Sensor
Author(s) -
Weizheng Yuan
Publication year - 2013
Publication title -
journal of mechanical engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.216
H-Index - 12
ISSN - 0577-6686
DOI - 10.3901/jme.2013.20.002
Subject(s) - silicon , materials science , surface micromachining , optoelectronics , pressure sensor , acoustics , engineering , mechanical engineering , physics , medicine , fabrication , alternative medicine , pathology
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