Open AccessCentral Composite Design Test Based Process Parameters Optimizing for Compound Machining with Ultrasonic Vibration on SiC Wafer
Author(s) -
Yong Liu
Publication year - 2013
Publication title -
journal of mechanical engineering
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.342
H-Index - 50
ISSN - 0577-6686
DOI - 10.3901/jme.2013.07.193
Subject(s) - machining , composite number , wafer , vibration , materials science , ultrasonic sensor , composite material , mechanical engineering , structural engineering , engineering , acoustics , metallurgy , optoelectronics , physics
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