Open AccessA Kinetic Monte Carlo Study for Mono- and Bi-layer Growth of MoS<sub>2</sub> during Chemical Vapor Deposition
Author(s) -
Shuai CHEN,
Junfeng Gao,
M. S. Bharathi,
Yong-Wei ZHANG
Publication year - 2019
Publication title -
wuli huaxue xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.396
H-Index - 37
ISSN - 1000-6818
DOI - 10.3866/pku.whxb201812023
Subject(s) - kinetic monte carlo , chemical vapor deposition , monte carlo method , layer (electronics) , deposition (geology) , materials science , kinetic energy , chemical engineering , chemistry , nanotechnology , physics , engineering , mathematics , geology , paleontology , statistics , quantum mechanics , sediment