Open AccessAtomic Layer Deposition: A Gas Phase Route to Bottom-up Precise Synthesis of Heterogeneous Catalyst
Author(s) -
王恒伟,
路军岭
Publication year - 2018
Publication title -
wuli huaxue xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.396
H-Index - 37
ISSN - 1000-6818
DOI - 10.3866/pku.whxb201804201
Subject(s) - atomic layer deposition , deposition (geology) , layer (electronics) , catalysis , gas phase , phase (matter) , materials science , chemical engineering , top down and bottom up design , nanotechnology , chemistry , computer science , geology , engineering , organic chemistry , paleontology , software engineering , sediment