Open AccessThe Role of Sulfite in the Wetting Etching of Silicon and Silica
Author(s) -
Jin Ouyang,
Nianzu Wu,
Xinsheng Zhao
Publication year - 2004
Publication title -
wuli huaxue xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.396
H-Index - 37
ISSN - 1000-6818
DOI - 10.3866/pku.whxb20040612
Subject(s) - wetting , etching (microfabrication) , sulfite , silicon , materials science , chemical engineering , nanotechnology , chemistry , metallurgy , composite material , inorganic chemistry , layer (electronics) , engineering