Open AccessOptical Emission Spectroscopy in Diamond-Like Carbon Film Deposition
Author(s) -
Weiping Zhang,
Jing Chen,
Fang Rong-Chun,
Keliang Hu
Publication year - 1992
Publication title -
wuli huaxue xuebao
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.396
H-Index - 37
ISSN - 1000-6818
DOI - 10.3866/pku.whxb19920318
Subject(s) - materials science , spectroscopy , carbon fibers , deposition (geology) , diamond , diamond like carbon , soft x ray emission spectroscopy , optoelectronics , carbon film , nanotechnology , thin film , metallurgy , composite material , geology , physics , time resolved spectroscopy , paleontology , quantum mechanics , sediment , composite number