Open AccessAnalysis of Impact of Conic Aperture in Differentially Pumped Chamber
Author(s) -
Jiří Maxa,
Pavla Hlavatá,
Petr Vyroubal
Publication year - 2019
Publication title -
advances in military technology
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.137
H-Index - 11
eISSN - 2533-4123
pISSN - 1802-2308
DOI - 10.3849/aimt.01268
Subject(s) - conic section , conical surface , aperture (computer memory) , fluent , optics , mechanics , mechanical engineering , physics , computer science , materials science , computational fluid dynamics , engineering , mathematics , geometry
The paper focuses on the simulation of medium dynamics in the environmental scanning electron microscope. In particular, the paper examines the conical aperture location effect in the differentially pumped chamber and the width of the pumping channel in this chamber. The solution is based on the Taylor-Maccoll theory about the impact of the shock wave and was obtained by the use of continuum and finite volume methods in the ANSYS Fluent system.