Open AccessLaser micromachining of high-aspect-ratio metallic channels for the application to microthermal devices
Author(s) -
Kwang-Hwan Oh,
Min-Kyu Lee,
Sungho Jeong
Publication year - 2006
Publication title -
han-guk gwanghak hoeji/han'gug gwanghag hoeji
Language(s) - English
Resource type - Journals
eISSN - 2287-321X
pISSN - 1225-6285
DOI - 10.3807/kjop.2006.17.5.437
Subject(s) - fabrication , materials science , aspect ratio (aeronautics) , laser , surface micromachining , etching (microfabrication) , optics , laser power scaling , process (computing) , optoelectronics , composite material , layer (electronics) , computer science , medicine , alternative medicine , physics , pathology , operating system