
Real time control of the growth of Ge-Sb-Te multi-layer film as an optical recording media using in-situ ellipsometry
Publication year - 2002
Publication title -
han-guk gwanghak hoeji/han'gug gwanghag hoeji
Language(s) - English
Resource type - Journals
eISSN - 2287-321X
pISSN - 1225-6285
DOI - 10.3807/kjop.2002.13.3.215
Subject(s) - ellipsometry , in situ , optics , materials science , layer (electronics) , optical disc , optoelectronics , thin film , chemistry , physics , nanotechnology , organic chemistry