Open AccessInvestigation on HT-AlN Nucleation Layers and AlGaN Epifilms Inserting LT-AlN Nucleation Layer on C-Plane Sapphire Substrate
Author(s) -
Danghui Wang,
Tao Xu
Publication year - 2016
Publication title -
journal of the optical society of korea/journal of the optical society of korea
Language(s) - English
Resource type - Journals
eISSN - 2093-6885
pISSN - 1226-4776
DOI - 10.3807/josk.2016.20.1.125
Subject(s) - materials science , nucleation , sapphire , layer (electronics) , substrate (aquarium) , optoelectronics , composite material , optics , chemistry , laser , physics , oceanography , organic chemistry , geology