Open AccessFabrication of Nano Dot and Line Arrays Using NSOM Lithography
Author(s) -
Sangjin Kwon,
Pilgyu Kim,
Sungho Jeong,
Won−Seok Chang,
Chaemin Chun,
DongYu Kim
Publication year - 2005
Publication title -
journal of the optical society of korea/journal of the optical society of korea
Language(s) - English
Resource type - Journals
eISSN - 2093-6885
pISSN - 1226-4776
DOI - 10.3807/josk.2005.9.1.016
Subject(s) - materials science , near field scanning optical microscope , fabrication , photoresist , laser , optoelectronics , wafer , lithography , optics , etching (microfabrication) , resist , silicon , optical microscope , nanotechnology , scanning electron microscope , layer (electronics) , medicine , alternative medicine , physics , pathology , composite material