Open AccessFast Analysis of Film Thickness in Spectroscopic Reflectometry using Direct Phase Extraction
Author(s) -
Kwangrak Kim,
Soonyang Kwon,
Heui Jae Pahk
Publication year - 2017
Publication title -
current optics and photonics
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.244
H-Index - 7
eISSN - 2508-7274
pISSN - 2508-7266
DOI - 10.3807/copp.2017.1.1.029
Subject(s) - reflectometry , materials science , optics , range (aeronautics) , phase (matter) , pixel , computation , nonlinear system , computer science , algorithm , physics , composite material , computer vision , time domain , quantum mechanics