Open Access倾角沉积制备Ta2O5薄膜的光学性质和微结构研究
Author(s) -
Xiudi Xiao,
Guoping Dong,
Hongbo He,
Hongji Qi,
Zhengxiu Fan,
Jianda Shao
Publication year - 2009
Publication title -
chinese optics letters
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.617
H-Index - 37
ISSN - 1671-7694
DOI - 10.3788/col20090710.0967
Subject(s) - optics , computer science , physics
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