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Application of the three-dimensional reconstruction method using scanning electron microscopy stereo images for calibration of step height standards in sub-micrometer range
Author(s) -
V. B. Mityukhlyaev,
Viktor Maslov,
Th. Ahbe,
Gaoliang Dai,
Xinda Hu,
Alexander C. Diener,
D. A. Karabanov,
E. A. Milovanova
Publication year - 2020
Publication title -
xxviii российская конференция по электронной микроскопии и vi школа молодых учёных "современные методы электронной, зондовой микроскопии и комплементарные методы в исследованиях наноструктур и наноматериалов"
Language(s) - English
Resource type - Conference proceedings
DOI - 10.37795/rcem.2020.90.52.062
Subject(s) - micrometer , calibration , scanning electron microscope , microscopy , materials science , range (aeronautics) , optics , computer vision , artificial intelligence , computer science , physics , quantum mechanics , composite material

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