Open AccessStructure of silicon nitride obtained by plasma-chemical synthesis..
Author(s) -
О. В. Сидорова,
A. S. Nikitin,
А. В. Кадетова,
Л. А. Алешина
Publication year - 2020
Publication title -
trudy kolʹskogo naučnogo centra ran
Language(s) - English
Resource type - Journals
ISSN - 2307-5252
DOI - 10.37614/2307-5252.2020.3.4.035
Subject(s) - silicon nitride , materials science , plasma , nitride , nanoscopic scale , silicon , diffraction , nanotechnology , chemical engineering , optoelectronics , optics , layer (electronics) , physics , engineering , quantum mechanics
X-ray diffraction results of short-range order in nanoscale powders of silicon nitride obtained by plasma-chemical synthesis are presented. It is shown that the most probable structure of nanopowder silicon nitride can be characterized by a model of a disordered network of SiN4tetrahedra.