Open AccessFabrication and Time-Dependent Analysis of Micro-Hole in GaAs(100) Single Crystal Wafer Using Wet Chemical Etching Method
Author(s) -
Ha Young Lee,
Min Sub Kwak,
Kyung-Won Lim,
Hyung Soo Ahn,
Sam Nyung Yi
Publication year - 2019
Publication title -
han'gug jaeryo haghoeji/han-guk jaeryo hakoeji
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.153
H-Index - 10
eISSN - 2287-7258
pISSN - 1225-0562
DOI - 10.3740/mrsk.2019.29.3.155
Subject(s) - materials science , wafer , etching (microfabrication) , isotropic etching , optoelectronics , crystal (programming language) , fabrication , scanning electron microscope , single crystal , optics , analytical chemistry (journal) , nanotechnology , composite material , crystallography , chemistry , medicine , alternative medicine , physics , layer (electronics) , pathology , chromatography , computer science , programming language