Open AccessLow-Temperature Deposition of Ga-Doped ZnO Films for Transparent Electrodes by Pulsed DC Magnetron Sputtering
Author(s) -
Dongkeun Cheon,
Kyung-Jun Ahn,
Woong Lee
Publication year - 2017
Publication title -
han'gug jaeryo haghoeji/han-guk jaeryo hakoeji
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.153
H-Index - 10
eISSN - 2287-7258
pISSN - 1225-0562
DOI - 10.3740/mrsk.2017.27.2.69
Subject(s) - materials science , sputter deposition , nucleation , deposition (geology) , doping , thin film , composite material , grain size , pulsed dc , optoelectronics , sputtering , cavity magnetron , nanotechnology , paleontology , chemistry , organic chemistry , sediment , biology