Open AccessCharacterization of the Schottky Barrier Height of the Pt/HfO2/p-type Si MIS Capacitor by Internal Photoemission Spectroscopy
Author(s) -
Sang Yeon Lee,
Hyungtak Seo
Publication year - 2017
Publication title -
han'gug jaeryo haghoeji/han-guk jaeryo hakoeji
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.153
H-Index - 10
eISSN - 2287-7258
pISSN - 1225-0562
DOI - 10.3740/mrsk.2017.27.1.48
Subject(s) - materials science , schottky barrier , characterization (materials science) , photoemission spectroscopy , capacitor , spectroscopy , optoelectronics , x ray photoelectron spectroscopy , nanotechnology , nuclear magnetic resonance , electrical engineering , voltage , physics , engineering , diode , quantum mechanics