Open AccessElectrical Properties and Microstructures in Ti Films Deposited by TFT dc Sputtering
Author(s) -
Chang-Suk Han,
Seung-Jin Jeon
Publication year - 2016
Publication title -
han'gug jaeryo haghoeji/han-guk jaeryo hakoeji
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.153
H-Index - 10
eISSN - 2287-7258
pISSN - 1225-0562
DOI - 10.3740/mrsk.2016.26.4.207
Subject(s) - materials science , sputtering , microstructure , thin film transistor , metallurgy , optoelectronics , composite material , nanotechnology , thin film , layer (electronics)