Open AccessElectrical Properties and Microstructures in Ti Films Deposited by TFT dc Sputtering
Author(s) -
Chang-Suk Han,
Seung-Jin Jeon
Publication year - 2016
Publication title -
korean journal of materials research
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.153
H-Index - 10
eISSN - 2287-7258
pISSN - 1225-0562
DOI - 10.3740/mrsk.2016.26.4.207
Subject(s) - sputtering , materials science , electrical resistivity and conductivity , microstructure , texture (cosmology) , anisotropy , composite material , thin film , analytical chemistry (journal) , optics , nanotechnology , chemistry , electrical engineering , image (mathematics) , physics , chromatography , artificial intelligence , computer science , engineering
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