Open AccessCharacterization of ZTO Thin Films Transistor Deposited by On-axis Sputtering and Facing Target Sputtering(FTS)
Author(s) -
Se-Hee Lee,
SoonGil Yoon
Publication year - 2016
Publication title -
han'gug jaeryo haghoeji/han-guk jaeryo hakoeji
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.153
H-Index - 10
eISSN - 2287-7258
pISSN - 1225-0562
DOI - 10.3740/mrsk.2016.26.12.676
Subject(s) - sputtering , materials science , thin film transistor , thin film , optoelectronics , composite material , layer (electronics) , nanotechnology