Open AccessStructure of Ti and Al Films Prepared by Cylindrical Sputtering System
Author(s) -
오창섭,
한창석
Publication year - 2014
Publication title -
han'gug jaeryo haghoeji/han-guk jaeryo hakoeji
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.153
H-Index - 10
eISSN - 2287-7258
pISSN - 1225-0562
DOI - 10.3740/mrsk.2014.24.7.344
Subject(s) - materials science , sputtering , metallurgy , composite material , nanotechnology , thin film