Open AccessStructure of Ti and Al Films Prepared by Cylindrical Sputtering System
Author(s) -
창섭 오,
창석 한
Publication year - 2014
Publication title -
korean journal of materials research
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.153
H-Index - 10
eISSN - 2287-7258
pISSN - 1225-0562
DOI - 10.3740/mrsk.2014.24.7.344
Subject(s) - materials science , sputtering , metallurgy , composite material , nanotechnology , thin film
Accelerating Research
Robert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom
Address
John Eccles HouseRobert Robinson Avenue,
Oxford Science Park, Oxford
OX4 4GP, United Kingdom