Open AccessAtomic Layer Deposition: Overview and Applications
Author(s) -
석윤 신,
형탁 전,
기열 함,
희영 전,
진규 박,
우출 장
Publication year - 2013
Publication title -
korean journal of materials research
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.153
H-Index - 10
eISSN - 2287-7258
pISSN - 1225-0562
DOI - 10.3740/mrsk.2013.23.8.405
Subject(s) - materials science , atomic layer deposition , layer (electronics) , deposition (geology) , nanotechnology , engineering physics , engineering , geology , paleontology , sediment
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