Open AccessAtomic Layer Deposition: Overview and Applications
Author(s) -
신석윤,
함기열,
전희영,
박진규,
장우출,
전형탁
Publication year - 2013
Publication title -
han'gug jaeryo haghoeji/han-guk jaeryo hakoeji
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.153
H-Index - 10
eISSN - 2287-7258
pISSN - 1225-0562
DOI - 10.3740/mrsk.2013.23.8.405
Subject(s) - materials science , atomic layer deposition , layer (electronics) , deposition (geology) , nanotechnology , engineering physics , engineering , geology , paleontology , sediment