Open AccessEffects of Precursor on the Electrical Properties of Spin-on Dielectric Films
Author(s) -
Wan-Gyu Lee
Publication year - 2011
Publication title -
han'gug jaeryo haghoeji/han-guk jaeryo hakoeji
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.153
H-Index - 10
eISSN - 2287-7258
pISSN - 1225-0562
DOI - 10.3740/mrsk.2011.21.4.236
Subject(s) - materials science , dielectric , spin (aerodynamics) , condensed matter physics , engineering physics , chemical engineering , optoelectronics , thermodynamics , engineering , physics