Open AccessEffect of Additives on the Refractive Index of B2O3-SiO2-Al2O3 Glasses for Photolithographic Process in Electronic Micro Devices
Author(s) -
Ju-Yeon Won,
Seongjin Hwang,
Jung-Ki Lee,
Hyung Sun Kim
Publication year - 2010
Publication title -
han'gug jaeryo haghoeji/han-guk jaeryo hakoeji
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.153
H-Index - 10
eISSN - 2287-7258
pISSN - 1225-0562
DOI - 10.3740/mrsk.2010.20.7.370
Subject(s) - refractive index , materials science , photolithography , analytical chemistry (journal) , high refractive index polymer , polarizability , nanotechnology , optoelectronics , molecule , chemistry , organic chemistry