Open AccessFabrication of Mo Nano Patterns Using Nano Transfer Printing with Poly Vinyl Alcohol Mold
Author(s) -
Ki Yeon Yang,
Kyung Min Yoon,
Ke Han,
Kyung Jae Byun,
Heon Lee
Publication year - 2009
Publication title -
han'gug jaeryo haghoeji/han-guk jaeryo hakoeji
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.153
H-Index - 10
eISSN - 2287-7258
pISSN - 1225-0562
DOI - 10.3740/mrsk.2009.19.4.224
Subject(s) - vinyl alcohol , materials science , transfer printing , wafer , lithography , nanotechnology , nanolithography , nano , mold , fabrication , immersion lithography , resist , layer (electronics) , composite material , polymer , optoelectronics , medicine , alternative medicine , pathology