Open AccessFabrication of Mo Nano Patterns Using Nano Transfer Printing with Poly Vinyl Alcohol Mold
Author(s) -
Giyeon Yang,
경민 윤,
강수 한,
경재 변,
Heon Lee
Publication year - 2009
Publication title -
korean journal of materials research
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.153
H-Index - 10
eISSN - 2287-7258
pISSN - 1225-0562
DOI - 10.3740/mrsk.2009.19.4.224
Subject(s) - vinyl alcohol , materials science , transfer printing , wafer , lithography , nanotechnology , nanolithography , nano , mold , fabrication , immersion lithography , resist , layer (electronics) , composite material , polymer , optoelectronics , pathology , medicine , alternative medicine
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