Open AccessMicrostructure Evaluation of Nano-thick Au-inserted Nickel Silicides
Author(s) -
Kijeong Yoon,
Ohsung Song
Publication year - 2008
Publication title -
han'gug jaeryo haghoeji/han-guk jaeryo hakoeji
Language(s) - Uncategorized
Resource type - Journals
SCImago Journal Rank - 0.153
H-Index - 10
eISSN - 2287-7258
pISSN - 1225-0562
DOI - 10.3740/mrsk.2008.18.1.005
Subject(s) - materials science , silicide , scanning electron microscope , nickel , microstructure , annealing (glass) , transmission electron microscopy , sheet resistance , silicon , thermal stability , nano , agglomerate , salicide , metallurgy , analytical chemistry (journal) , composite material , nanotechnology , chemical engineering , layer (electronics) , engineering , chemistry , chromatography