Open AccessEffects of Post-Annealing on Properties of HfO2 Films Grown by ALD
Author(s) -
Jae Whan Lee,
Moon Ho Ham,
W. J. Maeng,
H. Kim,
JaeMin Myoung
Publication year - 2007
Publication title -
han'gug jaeryo haghoeji/han-guk jaeryo hakoeji
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.153
H-Index - 10
eISSN - 2287-7258
pISSN - 1225-0562
DOI - 10.3740/mrsk.2007.17.2.096
Subject(s) - materials science , annealing (glass) , chemical engineering , composite material , engineering