Open AccessCharacteristic of copper films on PET substrate deposited by cyclic operation of RF-magnetron-sputtering coupled with continuous operation of ECR-CVD
Author(s) -
Myung JongYun,
Bupju Jeon,
Dongjin Byun,
Joong-Kee Lee
Publication year - 2005
Publication title -
han'gug jaeryo haghoeji/han-guk jaeryo hakoeji
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.153
H-Index - 10
eISSN - 2287-7258
pISSN - 1225-0562
DOI - 10.3740/mrsk.2005.15.7.465
Subject(s) - materials science , copper , sputtering , substrate (aquarium) , sputter deposition , optoelectronics , electrical resistivity and conductivity , deposition (geology) , composite material , cavity magnetron , thin film , metallurgy , nanotechnology , electrical engineering , engineering , paleontology , oceanography , sediment , geology , biology