Open AccessStability of Co/Ni Silicide in Metal Contact Dry Etch
Author(s) -
Ohsung Song,
Beom Sungjin,
Dug-Joong Kim
Publication year - 2004
Publication title -
han'gug jaeryo haghoeji/han-guk jaeryo hakoeji
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.153
H-Index - 10
eISSN - 2287-7258
pISSN - 1225-0562
DOI - 10.3740/mrsk.2004.14.8.573
Subject(s) - materials science , silicide , metal , metallurgy , dry etching , nanotechnology , etching (microfabrication) , silicon , layer (electronics)