Open AccessEliminating Voids in Direct Bonded Si/Si3N4∥SiO2/Si Wafer Pairs Using a Fast Linear Annealing
Author(s) -
Young-Soon Jung,
Ohsung Song,
Dug-Joong Kim,
YoungChang Joo
Publication year - 2004
Publication title -
han'gug jaeryo haghoeji/han-guk jaeryo hakoeji
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.153
H-Index - 10
eISSN - 2287-7258
pISSN - 1225-0562
DOI - 10.3740/mrsk.2004.14.5.315
Subject(s) - materials science , wafer , annealing (glass) , composite material , optoelectronics , metallurgy