Open AccessNew Fabrication Method of the Electron Beam Microcolumn and Its Performance Evaluation
Author(s) -
Sanghyun Ahn,
Kim D. W,
Kim Y. C,
Ahn S. J,
Kim Y. J,
Kim H. S
Publication year - 2004
Publication title -
han'gug jaeryo haghoeji/han-guk jaeryo hakoeji
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.153
H-Index - 10
eISSN - 2287-7258
pISSN - 1225-0562
DOI - 10.3740/mrsk.2004.14.3.186
Subject(s) - fabrication , materials science , cathode ray , electron , beam (structure) , nuclear engineering , optics , nuclear physics , engineering , physics , medicine , alternative medicine , pathology