Open AccessFabrication of Anodic Aluminum Oxide on Si and Sapphire Substrate
Author(s) -
Kim Munja,
Jin-Seung Lee,
Yoo Ji-Beom
Publication year - 2004
Publication title -
han'gug jaeryo haghoeji/han-guk jaeryo hakoeji
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.153
H-Index - 10
eISSN - 2287-7258
pISSN - 1225-0562
DOI - 10.3740/mrsk.2004.14.2.133
Subject(s) - materials science , anodizing , sapphire , substrate (aquarium) , evaporation , layer (electronics) , electropolishing , analytical chemistry (journal) , chemical engineering , electrolyte , electrode , aluminium , nanotechnology , metallurgy , optics , laser , oceanography , physics , chemistry , engineering , chromatography , geology , thermodynamics