Open AccessCharacteristics of NiCr Thin Films Prepared by rf Magnetron Sputtering as Absorption Layer for Infrared Sensors
Author(s) -
성기 허,
은석 최,
순길 윤
Publication year - 2003
Publication title -
korean journal of materials research
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.153
H-Index - 10
eISSN - 2287-7258
pISSN - 1225-0562
DOI - 10.3740/mrsk.2003.13.10.640
Subject(s) - materials science , nichrome , layer (electronics) , sputter deposition , optoelectronics , infrared , absorption (acoustics) , sputtering , thin film , composite material , optics , nanotechnology , physics
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