Open AccessDesign and Testing of a SOI Electric-field Microsensor
Author(s) -
Pengfei Yang,
Chunrong Peng,
Haiyan Zhang,
Shiguo Liu,
Shanhong Xia
Publication year - 2011
Publication title -
dianzi yu xinxi xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.191
H-Index - 27
ISSN - 1009-5896
DOI - 10.3724/sp.j.1146.2010.01285
Subject(s) - silicon on insulator , microelectromechanical systems , materials science , optoelectronics , electric field , electrical engineering , silicon , engineering , physics , quantum mechanics