Open AccessMOLECULAR DYNAMICS SIMULATION OF THE BINDIND PROPERTY BETWEEN CROSS-LINKED SU-8 PHOTORESIST AND Ni SUBSTRATE
Author(s) -
Liqun Du,
Zhaopei Guo,
Xiaolei Zhang
Publication year - 2010
Publication title -
gaofenzi xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.423
H-Index - 23
ISSN - 1000-3304
DOI - 10.3724/sp.j.1105.2010.09196
Subject(s) - photoresist , molecular dynamics , substrate (aquarium) , materials science , property (philosophy) , dynamics (music) , chemical physics , nanotechnology , computational chemistry , chemistry , physics , geology , philosophy , oceanography , epistemology , layer (electronics) , acoustics