Open AccessSTUDY ON MICROPEN DIRECT-WRITE DEPOSITION OF POLYIMIDE PATTERNS
Author(s) -
Yuliang Cao,
Xiaoye Wang,
Liangwen Zhou,
Jin Xu,
Xiaoyan Zeng
Publication year - 2009
Publication title -
gaofenzi xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.423
H-Index - 23
ISSN - 1000-3304
DOI - 10.3724/sp.j.1105.2009.00489
Subject(s) - polyimide , materials science , deposition (geology) , composite material , geology , layer (electronics) , paleontology , sediment