Open AccessMICROPATTERNS OF PMMA FABRICATED BY THIN LAYER SOFT LITHOGRAPHY
Author(s) -
Jianping Liu,
J.X. Shi,
XiaoMin Yang,
Pingsheng He,
Haiyang Yang
Publication year - 2009
Publication title -
gaofenzi xuebao
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.423
H-Index - 23
ISSN - 1000-3304
DOI - 10.3724/sp.j.1105.2007.00042
Subject(s) - materials science , soft lithography , layer (electronics) , lithography , optoelectronics , composite material , nanotechnology , fabrication , medicine , alternative medicine , pathology