Open AccessLow-temperature deposition of SiO<SUB>2</SUB> nanophotonic film
Author(s) -
Ming-Yu Sheng,
Yuan Zhao,
Fuqiang Liu,
HU Qiao-duo,
Yu-Xiang Zheng,
LiangYao Chen
Publication year - 2012
Publication title -
journal of infrared and millimeter waves
Language(s) - English
Resource type - Journals
SCImago Journal Rank - 0.206
H-Index - 27
ISSN - 1001-9014
DOI - 10.3724/sp.j.1010.2011.00237
Subject(s) - nanophotonics , materials science , deposition (geology) , optoelectronics , engineering physics , computer science , physics , geology , paleontology , sediment
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