Open AccessMulti-level analysis of atomic layer deposition barrier coatings on additively manufactured plastics for high vacuum applications
Author(s) -
Nupur Bihari
Publication year - 2021
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.37099/mtu.dc.etdr/1208
Subject(s) - atomic layer deposition , electronics , nanotechnology , layer (electronics) , deposition (geology) , photonics , materials science , vacuum deposition , engineering physics , engineering , optoelectronics , electrical engineering , paleontology , sediment , biology