Open AccessMulti-level analysis of atomic layer deposition barrier coatings on additively manufactured plastics for high vacuum applications
Author(s) -
Nupur Bihari
Publication year - 2021
Language(s) - English
Resource type - Dissertations/theses
DOI - 10.37099/mtu.dc.etdr/1208
Subject(s) - atomic layer deposition , electronics , nanotechnology , layer (electronics) , deposition (geology) , photonics , materials science , engineering physics , vacuum deposition , engineering , electrical engineering , optoelectronics , paleontology , sediment , biology
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