Open AccessEFFECT OF ANNEALING CONDITIONS ON ELECTRICAL PROPERTIES, SURFACE MORPHOLOGY AND MICROSTRUCTURE OF Mo/Al/Mo/Au OHMIC CONTACTS ON AlGaN/GaN HETEROSTRUCTURES
Author(s) -
M.N. Kondakov,
S.V. Chernykh,
A.V. Chernykh,
D.A. Podgorny,
N.B. Gladysheva,
A.A. Dorofeev,
S.I. Didenko,
D.B. Karpov,
T.A. Zhukova
Publication year - 2018
Publication title -
èlektronnaâ tehnika. seriâ 2. poluprovodnikovye pribory
Language(s) - English
Resource type - Journals
ISSN - 2073-8250
DOI - 10.36845/2073-8250-2018-249-2-40-47
Subject(s) - ohmic contact , heterojunction , materials science , microstructure , annealing (glass) , optoelectronics , morphology (biology) , metallurgy , nanotechnology , layer (electronics) , biology , genetics