Open AccessAnalysis of U shaped MEMS Micro cantilever using COMSOL
Author(s) -
K. Durga Aparna,
N. Amarnath
Publication year - 2020
Publication title -
international journal of recent technology and engineering
Language(s) - English
Resource type - Journals
ISSN - 2277-3878
DOI - 10.35940/ijrte.f7453.038620
Subject(s) - cantilever , multiphysics , microelectromechanical systems , silicon , substrate (aquarium) , materials science , finite element method , beam (structure) , structural engineering , mechanical engineering , engineering , nanotechnology , composite material , optoelectronics , oceanography , geology
This paper explains about analysis of U shaped MEMS cantilever with silicon substrate using COMSOL Multiphysics software. This U shape cantilever structure is made of silicon and on that different layers are incorporated. U shape cantilever will have high beam length and this design can meet any requirements with allowable strain limits.