Analysis of U shaped MEMS Micro cantilever using COMSOL | Zendy

K. Durga Aparna | Zendy; N. Amarnath | Zendy

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Analysis of U shaped MEMS Micro cantilever using COMSOL

Author(s) -

K. Durga Aparna,

N. Amarnath

Publication year - 2020

Publication title -

international journal of recent technology and engineering (ijrte)

Language(s) - English

Resource type - Journals

ISSN - 2277-3878

DOI - 10.35940/ijrte.f7453.038620

Subject(s) - cantilever , multiphysics , microelectromechanical systems , silicon , substrate (aquarium) , materials science , finite element method , mechanical engineering , structural engineering , nanotechnology , engineering , composite material , optoelectronics , oceanography , geology

This paper explains about analysis of U shaped MEMS cantilever with silicon substrate using COMSOL Multiphysics software. This U shape cantilever structure is made of silicon and on that different layers are incorporated. U shape cantilever will have high beam length and this design can meet any requirements with allowable strain limits.

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