Performance Analysis of SAW Gas Sensors with Different Number of Electrodes | Zendy

Anuj Kumar Goel | Zendy; B. Siva Kumar Reddy | Zendy

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Performance Analysis of SAW Gas Sensors with Different Number of Electrodes

Author(s) -

Anuj Kumar Goel,

B. Siva Kumar Reddy

Publication year - 2019

Publication title -

international journal of recent technology and engineering (ijrte)

Language(s) - English

Resource type - Journals

ISSN - 2277-3878

DOI - 10.35940/ijrte.c5530.098319

Subject(s) - electrode , materials science , finite element method , acoustics , optoelectronics , electronic engineering , physics , engineering , structural engineering , quantum mechanics

SAW technology is used to detect presence of certain molecules as used for gas sensing. Different geometries are designed with variation in number of interdigitated electrodes. Designed device used the layers of materials with variation of depth. FEM analysis is performed for two different structures. Shift in resonant frequency is observed as performance measuring parameter. Deformed shape plots are obtained with electric potential distributions for different eigenfrequencies. Different simulation results are compared to get highly sensitive device. Applications are found in many applications to sense micro, nano particles etc.

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