Open AccessMEMS Piezoresitive cantilever mass sensor response for detection of volatile organic compounds using Omnicant experimental platform
Author(s) -
K.Durga Aparna*,
Prof.D.V.Rama Koti Reddy,
Dr.B.Rajesh kumar
Publication year - 2019
Publication title -
international journal of recent technology and engineering
Language(s) - English
Resource type - Journals
ISSN - 2277-3878
DOI - 10.35940/ijrte.b3540.098319
Subject(s) - cantilever , piezoresistive effect , acetone , molecule , microelectromechanical systems , materials science , analyte , analytical chemistry (journal) , deflection (physics) , chemistry , nanotechnology , chromatography , organic chemistry , composite material , optics , physics
MEMS piezoresitive cantilever is a system that is utilized to identify VOC molecules like acetone, ethanol, isopropyl and ethyl acetate. These molecules have molecular weights ranging from 46.07gms/mole to 88.1gms/mole. These molecules can be identified due to the deflection changes of the cantilever when the change in the mass occurs due to the deposition of molecules on the cantilever. Thus in this paper the responses from the piezoresistive micro cantilever with different analytes using OMNICANT were obtained.