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Performance Measures of Different Gate Oxide Materials in Gate All Around Fet
Author(s) -
Shaik Ahmad Saidulu,
R.Sai Vineeth,
Y.Tanmayee,
B.Meenakshi
Publication year - 2020
Publication title -
international journal of recent technology and engineering
Language(s) - English
Resource type - Journals
ISSN - 2277-3878
DOI - 10.35940/ijrte.a2626.079220
Subject(s) - cmos , materials science , mosfet , field effect transistor , silicon , gate oxide , transistor , optoelectronics , nanowire , semiconductor , metal gate , scaling , nanometre , planar , nanotechnology , engineering physics , electronic engineering , electrical engineering , computer science , engineering , voltage , geometry , mathematics , computer graphics (images) , composite material
The classical planar Metal Oxide Semiconductor Field Effect Transistors (MOSFET) is fabricated by oxidation of a semiconductor namely Silicon. In this generation, an advanced technique called 3D system architecture FETs, are introduced for high performance and low power quality of devices. Based on the limitations of Short Channel Effect (SCE), Silicon (Si) FET cannot be scaled under 10nm. Hence various performing measures like methods, principles, and geometrics are done to upscale the semiconductor. CMOS using alternate channel materials like GE and III-Vs on substrates is a highly anticipated technique for developing nanowire structures. By considering these issues, in this paper, we developed a simulation model that provides accurate results basing on Gate layout and multi-gate NW FET’s so that the scaling can be increased few nanometers long and performance limits gradually increases. The model developed is SILVACO that tests the action of FET with different gate oxide materials.

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