Force Characterization and Optimization of the Bottom-Driven Type and Side-Driven Type Rotary Motion Electrostatic Actuator using FEM

Three types of rotary motion electrostatic actuator were designed and analyzed using Finite Element Method (FEM) analysis. This paper will discuss the comparisons and detailed thrust force analysis of three types of the electrostatic actuator designs which are side-driven rotary electrostatic actuators, bottom-driven rotary electrostatic actuator (linear), and bottomdriven rotary electrostatic actuator (skewed). There are several similar parameters will be constant for the three types of rotary motion electrostatic actuator such as the number of pole of electrodes of rotor and stator, thickness of the rotor and stator, and air gap between the rotor and stator. The three designs that designed by the Ansys Maxwell 3D and analyze the force generated by the designs. There are several parameters that are varying: (I) the actuator thickness ;(ii) air gap between rotor and stator. In this paper, three types of designs for the rotary electrostatic actuator are discussed; i.e. (a) Bottom-driven (linear type), (b) bottom-driven (skewed type); and (c) Side-driven. From this research it was concluded that the bottom-driven (skewed type) actuator will produce the largest force compared to other actuator which is 5.95808mN.