Open AccessDesign and Simulation of Platinum Micro Heater for VOC sensing Applications
Author(s) -
Sri Sudewi,
S. Sri Surya Srikanth,
B Rajesh,
Vasagiri Suresh,
V Jyothi
Publication year - 2019
Publication title -
international journal of innovative technology and exploring engineering
Language(s) - English
Resource type - Journals
ISSN - 2278-3075
DOI - 10.35940/ijitee.b1038.1292s319
Subject(s) - microheater , microelectromechanical systems , materials science , finite element method , response time , optoelectronics , nanotechnology , mechanical engineering , computer science , fabrication , engineering , structural engineering , medicine , alternative medicine , computer graphics (images) , pathology
Micro electro-mechanical system (MEMS) technology is flourishing the development of various sensors. Conventionally MEMS devices have been extensively used for upward performance of gas sensors over a period of time. This paper presents the designing of meander shaped microheater with the commercial FEM tool is used for simulation. Microheater is designed for application of VOC sensing applications. As the volatile organic compounds are to be vaporized a microheater is used. The geometric aspects of the microheater state the temperature effects on the VOC’s.Thus the dimensions were optimized for uniform distribution of heat across the surface. It was observed from the analytical analysis and FEM simulation that at 2um thickness, Microheater was able to distribute the heat uniformity across the surface