Open-air-type Ar + H2O plasma treatment of polytetrafluoroethylene for improving Ag/PTFE adhesion strength: application to highly adhesive Ag direct wiring patterns | Zendy

Yuji Ohkubo | Zendy; Yoshinori Kodama | Zendy; M. Nishino | Zendy; Takaya Oshita | Zendy; Tsuyoshi Uehara | Zendy; Katsuyoshi Endo | Zendy; Kazuya Yamamura | Zendy

Open Access

Open-air-type Ar + H₂O plasma treatment of polytetrafluoroethylene for improving Ag/PTFE adhesion strength: application to highly adhesive Ag direct wiring patterns

Author(s) -

Yuji Ohkubo,

Yoshinori Kodama,

M. Nishino,

Takaya Oshita,

Tsuyoshi Uehara,

Katsuyoshi Endo,

Kazuya Yamamura

Publication year - 2020

Publication title -

japanese journal of applied physics

Language(s) - English

Resource type - Journals

SCImago Journal Rank - 0.487

H-Index - 129

eISSN - 1347-4065

pISSN - 0021-4922

DOI - 10.35848/1347-4065/ab9cd7

Subject(s) - polytetrafluoroethylene , adhesion , materials science , composite material , adhesive , atmospheric pressure plasma , plasma , morphology (biology) , bonding strength , polymer chemistry , layer (electronics) , quantum mechanics , biology , genetics , physics

We performed an open-air-type plasma treatment of polytetrafluoroethylene (PTFE) at atmospheric pressure to increase the adhesion strength between PTFE and an Ag metal film obtained from Ag ink. When PTFE was Ar plasma-treated without H 2 O addition for 600 s, the coloration of the PTFE surface occurred, and the Ag/PTFE adhesion strength was 0.06 N mm −1 . This adhesion strength was the same as that of the as-received PTFE (0.04 N mm −1 ). When the PTFE was Ar plasma-treated with the H 2 O addition of ca. 0.1% for 600 s, coloration did not occur, and the Ag/PTFE adhesion strength increased to 1.03 N mm −1 . The effects of H 2 O addition to the Ar plasma on the Ag/PTFE adhesion strength, surface chemical composition, surface morphology, and the surface hardness were investigated and discussed in this study.

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