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The active pixel image sensor based on a semi-floating gate transistor (SFGT-APS) has been proposed and investigated; however, the quantum efficiency (QE) and the sensitivity are too poor to meet low illumination intensity and high-speed application due to the shallow junction of photodiodes. In this work, we demonstrate a new structure, called buried photodiode semi-floating gate transistor active pixel image sensor (BSFGT-APS), which possesses enhanced QE, high sensitivity, and fast response speed. Moreover, BSFGT-APS has the same fill factor with SFGT-APS, which is 55% with a 1  μ m 2  photodiode in 0.13  μ m process. The basic device characteristics were investigated by Sentaurus TCAD simulation, including potential of photodiode, transient response, dark current, conversion gain, and full well capacity.

1T semi-floating gate image sensor with enhanced quantum efficiency and high response speed